Special Applications FPD, Semiconductors, and Solar Cells Limited-reflective This page Through-beam 60 page Glass-substrate Alignment Detection position accuracy: 0.2 mm max. No variation in detection positions even if the sensing distance changes. Tilting workpiece does not affect detection. Detection position accuracy: 0.2 mm max. 10 to 20mm Glass-substrate Mapping Stable detection is possible even for difficult-to- detect curved surfaces.
250 500 750 1000 1250 1500 1750 2000 2250 2500 E32-A08 E32-A08H2 Digital value Raw glass (t = 0.7 mm, rounded edges) Distance 0 5 10 15 20 25 30 35 40 45 50 55 60 E32-A09 Glass-substrate Alignment Water droplet Glass Presence Detection in Wet Processes Stable non-contact detection even with warped glass. Distance (mm) Spherical heads eliminate liquid build up. Liquid builds up on flat head. The spherical heads ensure stable detection without being influenced by liquid. Specifications Limited-reflective Fiber Units *1 If operation is affected by the background, perform power tuning to decrease the incident light level.
*2 The maximum allowable temperature is not the same for all parts of the Fiber Unit. Refer to the dimensions diagrams for details. Must not be repeatedly subject to rapid temperature changes. Note 1. The following mode names and response times apply to the modes given in the Sensing distance column. [E3X-ZV] GIGA: Giga-power mode (16 ms), HS: High-speed mode (250 μs), ST: Standard mode (1 ms), and SHS: Super-high-speed mode (50 μs) [E3NX-FA] GIGA: Giga-power mode (16 ms), HS: High-speed mode (250 μs), ST: Standard mode (1 ms), and SHS: Super-high-speed mode (30 μs) The sensing distances for the E3NX-FA are values for E3NX-FA @ devices. The distance for E3NX-FAH @ infrared models varies.
The E3X-HD Series offers the same sensing distance as the E3X-ZV. 2. 3.
58 Fiber Sensor Features Selection Guide Fiber Units Standard Installation Threaded Hex-shaped Cylindrical Saving Space Flat Sleeved Beam Improvements Small Spot High Power Narrow view BGS Transparent Objects Retro- reflective Limited- reflective Environmental Immunity Chemical- resistant, Oil-resistant Bending Heat- resistant Applications Area Detection Liquid-level Vacuum FPD, Semi, Solar Installation Information Fiber Amplifiers, Communications Unit, and Accessories Technical Guide and Precautions Model Index 58 St abl e detect ion Application Ambient temperature Appearance (mm) Bending radius of cable Sensing distance (mm) Standard sensing object Mod (minimum sensing object) 59 Page els Dimensions No.
E3X-ZV E3NX-FA Glass presence detection 70°C 20.5 3.8 14 IP40 R25 GIGA HS 0 to 15 0 to 15 Other modes ST : 0 to 15 SHS: 0 to 12 GIGA H 0 to 15 0 to 15 S Other modes ST : 0 to 15 SHS: 0 to 12 E32-L16 *1 E32-A08 *1 Soda glass with reflection factor of 7% E32-A08 *1 E32-A12 IP40 Glass- substrate Alignment 24.5 5 14 IP40 10 to 20 10 to 20 ST : 10 to 20 SHS: − 10 to 20 10 to 20 ST : 10 to 20 SHS: − IP40 300°C 26 5 18 IP30 IP30 70°C 24.5 5 14 IP40 12 to 30 12 to 30 ST : 12 to 30 SHS: − 12 to 3 12 to 3 0 ST : 12 to 30 0 SHS: − IP40 Mapping of glass substrates 23 9 20 IP40 15 to 38 15 to 38 (Center 25 ST : 15 to 38 SHS: − ) (Center 25) 15 to 38 15 to 38 (Center 2 ST : 15 to 38 SHS:
− 5) (Center 25) End surface E32-A09 of soda glass with reflection factor of 7% (t = 0.7 mm, rounded E32-A09 edges) IP40 300°C *2 30 9 24 IP40 20 to 30 20 to 30 (Center 25) ST : 20 to 30 SHS: − (Center 25) 20 to 3 20 to 30 (Center 2 0 ST : 20 to 30 SHS: − 5) (Center 25) IP40 Wet processes (Cleaning, Resist developing, and etching) 60°C 14 Mounting 20 hole A 40 IP67 R40 8 to 20 mm from tip of lens (Recommended sensing distance: 11 mm) 19 to 31 mm from center of mounting hole A (Recommended sensing distance: 22 mm) E32-L11 Glass (t=0.7mm) E32-L11 IP67 Wet processes (Resist stripping) 85°C Mounting hole A 38.5 17.5 IP67 8 to 20 mm from tip of lens (Recommended sensing distance:
11 mm) 32 to 44 mm from center of mounting hole A (Recommended sensing distance: 35 mm) IP67