Special Applications Vacuum-resistant Dimensions Installation Information 62 to 66 Page Through-beam Fiber Units (Set of 2) E32-T51V 1M (No Cutting) 57-A M4Ч0.7 (Aluminum) M2.6Ч0.45 4 dia. 3 dia. 4 dia. Opposite side 8 (SUS304) Washer (SUS304) 2.2 dia. Sensing surface 1.15 dia. 3 20 (30) 1,000 Connected to flange (vacuum side) 26 E32-T51V 1M (No Cutting) + E39-F1V E39-F1V 57-B 4 dia. 3 dia. M4Ч0.7 8.9 0.5 dia. hole 4 dia. M2.6Ч0.45 Effective depth: 3.8 countersinking depth: 0.9 8.9 25.9 (35.9) 1,000 6 E32-T84SV 1M (No Cutting) 57-C Sensing surface: 2 dia. 14.2 3 dia. (SUS304) 12 1,000 Connected to flange (vacuum side) max.30 12 3.5 dia. 4 dia. 6 R5 3 dia. 90° Flexible tube:
(Stainless steel) 2.9 dia. 4 dia. 2.2 dia. 26 E32-T10V 2M (Free Cutting) 57-D 2.2 dia. 2,000 E32-VF4 57-E 36 dia. Note 1. Mount the Flange so that the V40 O-ring is on the atmospheric-pressure side of the vacuum chamber wall. 2. Mounting-hole dimensions: 38 dia. ±0.5 mm 3. The maximum tightening torque is 9.8 N·m. 4. A V40 O-ring is provided. E32-VF1 53-F (96) (63) 10 (23) 22 5 19 30 20 dia. 22 M14Ч2 6 (33.53) Two, connectors One spring washer One nut Note 1. Mount the Flange so that the V15 O-ring is on the atmospheric-pressure side of the vacuum chamber wall. 2. Mounting-hole dimensions: 14.5 dia. ±0.2 mm 3.
The maximum tightening torque is 14.7 N·m for the clamp nut and 1.5 N·m for the connector. 4. A V15 O-ring, nut, spring washer, two connectors, and four O-rings for the fibers are provided. V15 O-ring - Reference Information for Model Selection - What Is a Vacuum-resistant Fiber Unit? • The Flange is designed to create an air-tight seal on the vacuum side. • The fibers and Flange on the vacuum side are made of non-outgassing materials. These parts are inspected, cleaned, and sealed in an air-tight package in a clean room prior to shipment.
Glass Stainles steel Fluoro-resin No outgassing 57 Fiber Sensor Features Selection Guide Fiber Units Threaded Standard Installation Hex-shaped Cylindrical Flat Saving Space Sleeved Small Spot Beam Improvements High Power Narrow view BGS Retro- reflective Transparent Objects Limited- reflective Chemical- resistant, Oil-resistant Environmental Immunity Bending Heat- resistant Area Detection Applications Liquid-level Vacuum FPD, Semi, Solar Installation Information Fiber Amplifiers, Communications Unit, and Accessories Technical Guide and Precautions Model Index 57 80 Four, 70 dia. 49 10 dia. 24 8 44 dia. 45° 80 ange 40 O-ring Flange 90 dia. 80 70 dia. 44 dia. 45°